发明名称 Fuse structure for maintaining passivation integrity
摘要 A fuse structure (106) includes a patterned conductor disposed over a passivation layer (302), which is disposed over a substrate (110), such as, for example, an inter-layer dielectric layer of an integrated circuit. A second passivation layer (112) is formed over the integrated circuit including over the fuse structure (106), and then patterned to open a window (108) through the second passivation layer (112) at a location over the fuse structure (106), with the window (108) fully landed by the underlying passivation layer (302). In various aspects of the present invention, the fuse (106) may be programmed either before or after the photoresist layer used in the patterning of the second passivation layer (112) is removed.
申请公布号 US7763951(B2) 申请公布日期 2010.07.27
申请号 US20040572225 申请日期 2004.09.18
申请人 NXP B.V. 发明人 ZIJLSTRA PIEBE ANNE;KILLIAN ELIZABETH ANN
分类号 H01L21/768;H01L23/525 主分类号 H01L21/768
代理机构 代理人
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