发明名称 |
Cooling device, and apparatus and method for manufacturing image display panel using cooling device |
摘要 |
The present invention provides a cooling device used for a process for heating and cooling a substrate constituting an image display apparatus that uses electron emitting devices. The cooling device includes a cooling plate located opposite the substrate to absorb radiation heat from the substrate. The cooling plate is provided with a high emissivity area in a pattern located opposite to a low emissivity area of the substrate. This suppresses a variation in a temperature distribution in the substrate during cooling, thus preventing the substrate from being distorted or damaged.
|
申请公布号 |
US7764872(B2) |
申请公布日期 |
2010.07.27 |
申请号 |
US20070676637 |
申请日期 |
2007.02.20 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YOSHIMURA MASANAO |
分类号 |
A21B1/00;C23C16/46;C30B25/10;F27B5/14;F27B17/00;G09F1/10;H01L21/00;H01L21/027;H01L21/205;H01L21/3065;H01L21/31 |
主分类号 |
A21B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|