发明名称 |
Ultra fine fiber polishing pad |
摘要 |
A polishing pad includes a body having a polymer layer and a polishing layer. The polymer layer has opposite first and second faces. The polymer layer includes a plurality of first ultrafine fibers and a polymer bonding the first ultrafine fibers together. The polishing layer is formed on the first face of the polymer layer. The polishing layer includes a plurality of second ultrafine fibers and is free of the polymer. The first and second ultrafine fibers are identical to each other. The second ultrafine fibers have a first concentration of ultrafine fibers by volume higher than 80% a total volume of the polishing layer. The first ultrafine fibers of the polymer layer have a second concentration of ultrafine fibers by volume to a total volume of the polymer layer. The first concentration is higher than the second concentration.
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申请公布号 |
US7762873(B2) |
申请公布日期 |
2010.07.27 |
申请号 |
US20080119580 |
申请日期 |
2008.05.13 |
申请人 |
SAN FANG CHEMICAL INDUSTRY CO., LTD. |
发明人 |
FENG CHUNG-CHIH;CHAO CHEN-HSIANG;YAO I-PENG |
分类号 |
B24D11/00 |
主分类号 |
B24D11/00 |
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