发明名称 Sloped cantilever beam electrode for a MEMS device
摘要 A method of tilting a micromirror includes providing a substrate, a sloped electrode outwardly from the substrate, and a sloped electrode positioning system outwardly from the substrate. The method also includes applying, by the sloped electrode positioning system, forces sufficient to position the sloped electrode in an orientation that slopes away from the substrate.
申请公布号 US7764418(B2) 申请公布日期 2010.07.27
申请号 US20080335680 申请日期 2008.12.16
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MANGRUM BRETT A.
分类号 G02B26/00;G02B26/08 主分类号 G02B26/00
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