| 摘要 |
FIELD: mechanics. ^ SUBSTANCE: method may be used to manufacture units comprising consumable or replaceable part and base made of materials with various coefficient of thermal expansion, for instance to fix consumable ceramic target on metal base in plants of magnetron sputtering. Layer containing carbon particles in the form of fibre or nanotubes or graphene is soldered onto surface of base by means of high-temperature solder. Part is soldered to other side of carbon layer by means of solder with temperature of melting below melt temperature of specified solder. In order to remove part, soldered joint of part with specified layer is heated up to the temperature over its melt temperature, but below melt temperature of hard solder. As layer containing carbon particles, woven or non-woven material is used on the basis of carbon nanofibre, or flock from carbon fibres or nanotubes or graphene. Layer containing carbon microparticles provides for thermal and electric contacts of part with base, and also reduce or eliminate thermomechanical stresses between them. ^ EFFECT: method advantage is expansion in resources of work with units having thermally controlled components, in particular increased speed of sputtering and increased coefficient of targets usage in process of magnetron sputtering. ^ 13 cl, 1 dwg, 1 ex |
