| 摘要 |
A hardware-information acquisition part, in the case of modification or addition to hardware configurations of semiconductor manufacturing devices to be managed, obtains that update information. To check the range of influence of a failure, as a first step, a software-condition conforming device extracting part extracts devices which have installed software related to the failure. Then, a hardware-condition conforming device extracting part determines, according to the information obtained by the hardware information acquisition part, whether the extracted devices satisfy hardware conditions under which the failure occurs, and if so, extracts those devices as the ones affected by the failure. Accordingly, even in the case of modification or addition to hardware, it is possible to ensure traceability of failures or requirements and thereby to identify the range of influence of failures with efficiency and reliability.
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