发明名称 |
Systems and methods for measurement of a specimen with vacuum ultraviolet light |
摘要 |
Various systems for measurement of a specimen are provided. One system includes a first optical subsystem, which is disposed within a purged environment. The purged environment may be provided by a differential purging subsystem. The first optical subsystem performs measurements using vacuum ultraviolet light. This system also includes a second optical subsystem, which is disposed within a non-purged environment. The second optical subsystem performs measurements using non-vacuum ultraviolet light. Another system includes two or more optical subsystems configured to perform measurements of a specimen using vacuum ultraviolet light. The system also includes a purging subsystem configured to maintain a purged environment around the two or more optical subsystems. The purging subsystem is also configured to maintain the same level of purging in both optical subsystems. Some systems also include a cleaning subsystem configured to remove contaminants from a portion of a specimen prior to measurements at vacuum ultraviolet wavelengths.
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申请公布号 |
US7764376(B2) |
申请公布日期 |
2010.07.27 |
申请号 |
US20090506019 |
申请日期 |
2009.07.20 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORP. |
发明人 |
FIELDEN JOHN;JANIK GARY;LEE SHING |
分类号 |
G01J4/00;G03F7/20;H01H27/00 |
主分类号 |
G01J4/00 |
代理机构 |
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