发明名称 Method to form an optical grating and to form a distributed feedback laser diode with the optical grating
摘要 A method for forming a grating with an adjustable pitch and a method for forming a DFB-LD with an optical grating whose pitch is adjustable during the process are disclosed. The method of the invention; first prepares a mold with a pattern to form the grating; second, pushes the mold against the resin as deforming the mold; and third, hardens the mold. The resin with a periodic pattern whose pitch is adjustable during the process is available.
申请公布号 US7763484(B2) 申请公布日期 2010.07.27
申请号 US20080155677 申请日期 2008.06.06
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 YANAGISAWA MASAKI
分类号 H01L21/00 主分类号 H01L21/00
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