Vacuum container apparatus used for manufacturing semiconductor devices and lid apparatus for same

摘要

A lid apparatus for opening/closing an opening of a main body includes a lid with working and back faces. An arm attaches the lid to the main body to be operable for opening/closing. The arm includes a first axis pivotally supporting the arm on the main body around the opening, and a second axis swingably supporting the back face of the lid on the arm. The second axis is located between the gravity center of the lid and the first axis. A regulatory member intervenes between the arm and the back face of the lid to set the working face of the lid in parallel with the opening.