发明名称 Method of controlling orientation of domains in block copolymer films
摘要 A method of orienting microphase-separated domains is disclosed, comprising applying a composition comprising an orientation control component, and a block copolymer assembly component comprising a block copolymer having at least two microphase-separated domains in which the orientation control component is substantially immiscible with the block copolymer assembly component upon forming a film; and forming a compositionally vertically segregated film on the surface of the substrate from the composition. The orientation control component and block copolymer segregate during film forming to form the compositionally vertically-segregated film on the surface of a substrate, where the orientation control component is enriched adjacent to the surface of the compositionally segregated film adjacent to the surface of the substrate, and the block copolymer assembly is enriched at an air-surface interface.
申请公布号 US7763319(B2) 申请公布日期 2010.07.27
申请号 US20080013138 申请日期 2008.01.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG JOY;KIM HO-CHEOL;SANDERS DANIEL P.;SUNDBERG LINDA
分类号 B05D5/00;B05D5/12 主分类号 B05D5/00
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