METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

摘要

PURPOSE: A method for manufacturing a semiconductor device is provided to eliminate residue from processing units by performing purifying operations with respect to each processing unit during a substrate is transferring between the processing units. CONSTITUTION: A semiconductor substrate is loaded into a processing chamber including a plurality of processing units(S100). A substrate is being transferred along the processing units, and separate operations are performed in each processing unit(S200). While the substrate is transferred between the processing units, a purifying operation is performed with respect to each processing unit(S300). By-products and residue from the processing units are eliminated.