| 摘要 |
A piezoceramic scanner comprises a base, a holder for an object or a probe, four bimorph elements each of which comprising a metal plate and a piezoelectric cell, a holder for an object or a probe in the form of a bimorph piezoelectric cell, the object holder is secured to other piezoelectric cell with help of rectangular-shaped plates. The length of bimorph elements which move the probe along one of coordinates, for example X, is set more or less than length of bimorph elements which move the probe along of other coordinate, for example Y. |
