| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate sensor capable of reducing stress concentration at a bonding part between a body part and a blade part of a mold resin. <P>SOLUTION: A stress mitigation part 53 integrated with the other surface 52c of the blade part 52 and a side face 54 of the body part 51 is provided so that an adhesive 60 for fixing a sensor chip 30 to a lead frame 10 includes a portion projected to the other surface 52c side of the blade part 52. Hereby, a thickness on the body part 51 side on the other surface 52c of the blade part 52 is thickened as much as a thickness portion of the stress mitigation part 53, and the blade part 52 becomes hard to bend with the bonding part between the body part 51 and the blade part 52 as a fulcrum. Consequently, stress concentration at the bonding part between the body part 51 and the blade part 52 is reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
