| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a structure of a two-way moving table used in a bonding device, capable of attaining speed-up. <P>SOLUTION: In the XY table used in a bonding device a Y-directional motor includes a Y-directional movable element 43. The Y-directional movable element 43 includes a movable arm 43a moving in XY direction together with the table, the movable arm being made of a rectangular sectional pipe of fiber-reinforced plastic whose one end is fixed to the table and which extends in Y-direction, and including an opening 43b extending in Y-direction on each narrow side surface, and an annular drive coil 44 inserted to the opening 43b of the movable arm 43a and attached to the movable arm 43a, a part of which projects out of the opening 43b of the movable arm 43a in the width direction of the movable arm. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
