| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly and highly accurately calculate yields in consideration of device variations, etc. Ž<P>SOLUTION: A simulation information creating part 111 generates random numbers corresponding to correlation coefficient data between the simulation model parameters, and also generates a simulation model library having varying correlated model parameters, and a simulation net list for objective characteristics, by Monte Carlo method using a typical simulation model library, standard deviations of a plurality of simulation model parameters and a simulation net list for typical objective characteristics. A simulator 112 acquires samples having varying objective characteristics. When determining pass or fail, or whether the samples satisfy a predetermined specification, and calculating yields, a yield calculator 120 performs simulation to redetermine the pass or fail only on the samples that are not determined as pass by a filter 114 having a function of learning a boundary for pass or fail determination. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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