STABLE GLASS SHEET AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide, by an economical production method, a glass sheet having a pristine surface suitable for a glass substrate for production of low-temperature polysilicon-based TFT displays. SOLUTION: A glass material has an anneal point of at least 765°C and a CTE of at most 42×10-7/°C. The production method includes heating the glass material to a temperature not lower than a temperature T1corresponding to a viscosity of 1.0×1010poise, and cooling the glass material from T1to a temperature T2corresponding to a viscosity of 1.0×1015poise at a cooling rate of CR (CR≥5°C/s). The glass material, upon completion of the above final step, has a measured compaction CM675, wherein the absolute value of the measured compaction is at most 175 ppm. A fusion-draw process is suitable for the above method. COPYRIGHT: (C)2010,JPO&INPIT