发明名称 |
SHORT PATH CUSTOMIZED MASK CORRECTION |
摘要 |
Embodiments of the present invention provide a method of performing photo-mask correction. The method includes identifying a hot-spot in a photo-mask that violates one or more predefined rules; creating a window area in the photo-mask that surrounds the hot spot; categorizing the window area; selecting a solution, from a library of pre-computed solutions, based on a category of the window area; and applying the solution to the hot spot. A service-oriented architecture (SOA) system that synchronizes the design to the process is also provided.
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申请公布号 |
US2010185999(A1) |
申请公布日期 |
2010.07.22 |
申请号 |
US20090355814 |
申请日期 |
2009.01.19 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GRAUR IOANA;MANSFIELD SCOTT M. |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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