发明名称 METHOD AND STRUCTURE FOR REDUCING CROSS-TALK IN IMAGE SENSOR DEVICES
摘要 Provided is a method of fabricating an image sensor device. The method includes providing a semiconductor substrate having a front side and a back side, forming a first isolation structure at the front side of the semiconductor substrate, thinning the semiconductor substrate from the back side, and forming a second isolation structure at the back side of the semiconductor substrate. The first and second isolation structures are shifted with respect to each other.
申请公布号 US2010181635(A1) 申请公布日期 2010.07.22
申请号 US20090405454 申请日期 2009.03.17
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 WANG CHING-CHUN;HSU TZU-HSUAN;LIU HAN-CHI;SU CHUN-MING
分类号 H01L31/04;H01L31/18 主分类号 H01L31/04
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