Micromechanical structure for rotary sensors, has substrate provided with main extending level, and seismic mass that moves relative to substrate

摘要

The micromechanical structure has a substrate (2) provided with a main extending level (100), and a seismic mass (3) that moves relative to the substrate. A finger electrode (21) is partly arranged between another finger electrode (31) and the substrate along a perpendicular direction (101). An independent claim is also included for a method for operating a micromechanical structure.