MICROSENSOR PRODUCED IN MICROSYSTEM TECHNOLOGIES FOR THE MEASUREMENT AND/OR DETECTION OF FOULING

摘要

The invention relates to a sensor (10; 34) for the measurement and/or detection of fouling occuring directly or indirectly on what is called a front face of the sensor, characterized in that it comprises, in the form of a plurality of superposed layers: at least one heating element (14) capable of diffusing, on command, a controlled uniform heat flux with a thermal power of less than 200 mW; a thermal insulator (11) placed on the opposite side from the front face of the sensor, in order to prevent dissipation of the heat flux on said opposite side; at least one temperature measurement element (16), which is placed in the uniform heat flux diffused by said at least one heating element and offers a temperature measurement precision better than 0.1°C; a substrate (12; 42) on which the layers of said at least one heating element and at least one temperature measurement element are attached.