FLANGED COLLET FOR DIE PICK-UP TOOL

摘要

PURPOSE: A flange collet for a die picking tool is provided to efficiently separate a die from a bonding surface by applying vacuum absorbing force through a collet on a die. CONSTITUTION: A collet(12) is located on a wafer tray(17) to receive a semiconductor die. The wafer tray is fixed on a ring holder(20). The collet includes a vacuum channel extended through the length of the collet. A flange is protruded from one side of the platform to meet at right angle. A pick arm table(14) drives the flange.