发明名称 DEVICE FOR CONTROLLING SUPERCONDUCTIVE LINEAR MOTOR, EXPOSURE APPARATUS USING THE SAME, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a device for controlling a superconductive linear motor which can suppress a disturbance force caused by superconductivity, and can perform high-accurate control. <P>SOLUTION: The device for controlling the superconductive linear motor includes: the superconductive linear motor having a coil 204 using a superconductive wire, and magnet units 203a, 203b using permanent magnets; a current driver 107 which feeds a current to the coil 204; and a position control system 101 which receives drive commands d of the magnet units, transmits command values based on the drive commands d to the current driver 107, and controls positions of the magnet units 203a, 203b. The device for controlling the superconductive linear motor further includes a conversion command calculation unit 104 having a control command table 105 on which the temperature information of the coil and relative position information with the magnet units and the coil are argued. The conversion command calculation unit 104 refers the control command table 105, converts the control command so as to reduce the disturbance force resulting from the superconductivity, and transmits the control command to the position control system 101. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010161839(A) 申请公布日期 2010.07.22
申请号 JP20090000994 申请日期 2009.01.06
申请人 CANON INC 发明人 ASANO TOSHIYA
分类号 H02P25/06;G03F7/20;H01L21/027 主分类号 H02P25/06
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