发明名称 IDLING METHOD OF MACHINING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an idling method of a machining device, saving on a processing liquid. SOLUTION: The idling method is used for the machining device provided with: a chuck table for holding a workpiece; and a machining means for machining the workpiece held on the chuck table while supplying the processing liquid so that the means executes idling while intermittently supplying the processing liquid. Preferably, the supply of the processing liquid is carried out intermittently 1-2 seconds for 10 seconds. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010158760(A) 申请公布日期 2010.07.22
申请号 JP20090235500 申请日期 2009.10.09
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 B24B55/02;B24B27/06;B28D1/24;B28D5/00;H01L21/301 主分类号 B24B55/02
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