| 摘要 |
PROBLEM TO BE SOLVED: To provide an static pressure gas bearing spindle capable of keeping sufficiently high self-excited vibration generating pressure compared with service air supply pressure even when housings having joining faces of poor surface accuracy are assembled to each other. SOLUTION: The aerostatic bearing spindle comprises a rotary shaft 1, and a fixed part 20 for surrounding an outer circumferential surface of the rotary shaft 1 across a bearing space 5 to which the gas for bearing for rotatably supporting the rotary shaft 1. The fixed part 20 includes a housing 2 and sheets 41, 42. The housing 2 consists of a plurality of members 21, 22, 23, and the plurality of members 21, 22, 23 are coupled with at least one joining part between the plurality of members 21, 22, 23 via the sheets 41, 42 having the characteristic more deformable than the housing 2. COPYRIGHT: (C)2010,JPO&INPIT
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