发明名称 COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE USING THE SAME
摘要 A composite substrate 10 includes: a piezoelectric substrate 12 capable of transmitting an elastic wave and composed of lithium tantalate (LT); a silicon support substrate 14 that is bonded to the rear surface of the piezoelectric substrate in the (111) plane; and an adhesive layer 16 bonding the substrates 12 and 14 to each other.
申请公布号 US2010182101(A1) 申请公布日期 2010.07.22
申请号 US20100688020 申请日期 2010.01.15
申请人 NGK INSULATORS, LTD. 发明人 SUZUKI KENJI
分类号 H03H9/17 主分类号 H03H9/17
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