APPARATUS AND METHOD FOR PRODUCING PLASMA

摘要

Disclosed is a plasma apparatus which can produce a stable high-density plasma with high cleanness and high purity, and can maintain a stable plasma continuously. Specifically disclosed is a plasma producing apparatus which comprises: a first plasma-producing chamber (10) having a gas supply opening (12) and a plasma outlet (13); a first plasma-producing means (11) which is arranged so as not to be exposed to the space within the first plasma-producing chamber; a second plasma-producing chamber (20) having a plasma supply opening (22) to which the plasma produced in the first plasma-producing chamber is supplied through the plasma outlet; and a second plasma-producing means (21) which is arranged so as not to be exposed to the space within the second plasma-producing chamber and produces a plasma within the second plasma-producing chamber, said plasma produced within the second plasma-producing chamber having a higher density than the plasma produced in the first plasma-producing chamber.