| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a program and a method for creating an original data advantageous for forming a pattern more faithful with a target pattern on a substrate. <P>SOLUTION: The program for creating an original data aims to produce an original to be used for an exposure apparatus that illuminates the original to project the pattern onto a substrate, and the program includes: a classification step of classifying the target pattern to be formed on the substrate into a plurality of direction groups; a partial light source determining step (S303) of, in each of the plurality of direction groups, extracting a region suitable for the resolution of the target pattern belonging to the corresponding direction group from an effective light source distribution formed in the pupil of the projection optical system by the illumination optical system, and determining the extracted region as a partial light source; a pattern determining step of determining a pattern to be arranged in the original by using one of the plurality of partial light sources as the illumination condition and carrying out this process for each of the plurality of partial light sources; and a composition step (S306) of composing the patterns determined in the pattern determining step. <P>COPYRIGHT: (C)2010,JPO&INPIT |
