| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray spectrometer capable of acquiring spectral diffraction of an X-ray in a wide wavelength range with excellent reproducibility, relative to the X-ray spectrometer. SOLUTION: This X-ray spectrometer includes: two spectroscopic elements 1, 2 arranged mutually approximately at an angle of about 90°, for receiving a characteristic X-ray 13 generated from a sample 11; a position sensitive detector 15 for receiving simultaneously each dispersed light from the two spectroscopic elements, and converting each light into electric signals; a memory for storing output from the position sensitive detector; an image processing part for reading out data stored in the memory, and performing prescribed image processing; and a display part for displaying spectral information by receiving output from the image processing part. COPYRIGHT: (C)2010,JPO&INPIT
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