| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature control device for low-temperature tests of ICs capable of suppressing excessive cooling of the temperature of a chamber when an IC is locally cooled. Ž<P>SOLUTION: This temperature control device for low-temperature tests of ICs includes: a chamber temperature controller 30 which performs on/off control of a first valve V<SB>1</SB>according to chamber temperature information I<SB>R</SB>from a chamber temperature sensor S<SB>R</SB>for detecting the chamber temperature T<SB>R</SB>inside a test chamber 10, and blows liquid nitrogen N<SB>2</SB>into the test chamber 10 from a first nozzle A of a fan 20; a local-temperature controller 40 which performs on/off control of a second valve V<SB>2</SB>and blows liquid nitrogen N<SB>2</SB>towards an IC 16 from a second nozzle B of the fan 20, according to IC temperature information I from an IC temperature sensor S<SB>IC</SB>set in a socket 14 on a test board 12 inside the test chamber 10 to detect the temperature T<SB>IC</SB>near the IC 16 under electric test; and a cold air generator 50 which generates cold air having a temperature T<SB>H</SB>higher than the chamber temperature T<SB>R</SB>from dry compressed air and blows the cold air into the test chamber 10, based on the chamber temperature information I<SB>R</SB>and the IC temperature information I, when the second valve V<SB>2</SB>is opened. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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