| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide thermal insulating material and chamber material which have a high insulation property and can be used for a chamber of an exposure device. <P>SOLUTION: A thermal insulating sheet 22 can be arranged on a part of the chamber of the exposure device, and includes an intermediate layer 23 for thermal insulation which is formed by connecting a plurality of flexible cells 26 in which gas having heat conductivity smaller than air is respectively sealed, a first outer packaging film 27 adhered on one surface of the intermediate layer 23 via a gas layer 28 between the plurality of cells 26, and a second outer packaging film 29 adhered on other surface of the intermediate layer 23 via a gas layer 30 between the plurality of cells 26. <P>COPYRIGHT: (C)2010,JPO&INPIT |
