HIGHER-ORDER SILANE COMPOSITION, METHOD FOR MANUFACTURING SUBSTRATE WITH FILM, ELECTRO-OPTICAL EQUIPMENT AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a higher-order silane composition capable of forming a safe, high-quality film with desired thickness through a liquid phase process. SOLUTION: The higher-order silane composition is a composition containing a higher-order silane compound and a solvent, provided that the solvent comprises a cyclic hydrocarbon which has one or two double bonds, does not have any alkyl group, comprises only carbons and hydrogens and has a refractive index of 1.40-1.51, a dielectric constant of≤3.0 and a molecular weight of≤180. COPYRIGHT: (C)2010,JPO&INPIT