| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element for which a piezoelectric element and a flexible printed wiring board are easily and strongly connected even when a resin, a composite material of the resin and ceramics or only the ceramics is used as a piezoelectric material and manufacturing efficiency is excellent, an ultrasonic apparatus using the vibration element, and a method of manufacturing the vibration element. SOLUTION: The vibration element 100 includes the piezoelectric element 110 and the flexible printed wiring board 120, wherein the piezoelectric element 110 and the flexible printed wiring board 120 are bonded through an anisotropic conductive film 130 to configure the vibration element 100. COPYRIGHT: (C)2010,JPO&INPIT
|
