| 摘要 |
An apparatus for inspecting and measuring an object to be measured includes: a distance measurement device having a light projector that projects a two-dimensional optical pattern onto a measurement target of the measurement object, imaging devices disposed in a stereoscopic arrangement that image the measurement object, and a driving device that rotates a posture of at least one of the imaging devices to control a parallax angle between the imaging devices; a working distance control device that controls the driving device and adjusts a position at which optical axes of the imaging devices intersect; and a distance calculation device having a correspondence position calculation device that determines a correspondence position at which the same region is imaged among images of the imaging devices, and a distance calculation devices that calculates a distance to the measurement target of the measurement object based on a calculation result of the calculation device.
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