| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a helium leak detector for detecting presence of extremely large leak without imposing a large load on a vacuum pump for a long period of time. Ž<P>SOLUTION: The helium leak detector includes: a current detector 22 detecting a current supplied to an oil rotary pump 3 when evacuating a vacuum container 100; and a circuit 23 of measuring a duration of threshold determination, the circuit stopping the evacuation of the vacuum container 100 when a state in which the current detected by the current detector 22 is equal to or more than a prescribed value continues for a prescribed time or more. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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