| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piping leak testing apparatus and a piping leak testing method for testing leaks without having to halt apparatuses regardless of the degree of vacuum in vacuum piping. Ž<P>SOLUTION: The piping leak testing apparatus in which a first piping leak testing device 10A sprays helium gas from the outside of a vacuum pipe 11-1 as evacuating the air from the inside of the vacuum pipe 11-1 and detects helium gas leaking into the vacuum pipe 11-1 includes a helium gas splay nozzle 21 for splaying helium gas to the vacuum pipe 11-1; a vacuum-evacuating extraction pipe 17 branched from the vacuum pipe 11-2; a differential discharge chamber 24 provided for the vacuum-evacuating extraction pipe 17 and constituted of both an orifice 22 to reduce the pressure of helium gas branched from the vacuum pipe 11-2 and a body 23 for adjusting the degree of vacuum and the quantity of flow of helium gas; a second vacuum pump 25 connecting to the differential discharge chamber 24; and a helium leak detector 18 provided for the rear flow side of the differential discharge chamber 24 for detecting helium gas after pressure adjustments. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
