| 摘要 |
A method for manufacturing an optical element that has a function to polarize and split incident light includes: a) forming a grid portion on a face of a substrate in a plural number with a predetermined pitch; b) forming a diffractive structure resist pattern on the face of the substrate, the diffractive structure resist pattern corresponding to a diffractive structure that has a plurality of concave portions and a plurality of convex portions, the concave portions and the convex portions being arranged alternatively on the face of the substrate; c) forming the diffractive structure by etching the substrate anisotropically in a thickness direction with the diffractive structure resist pattern; and d) forming a fine line on the grid portion by depositing a reflective material from an oblique direction onto the face of the substrate where the diffractive structure is provided, the fine line being provided in a direction in which the grid portion extends.
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