<p>Disclosed is a capacitor characterized by comprising: a lower electrode layer comprising an electrically conductive metal or a compound of the metal; a first dielectric film formed on the lower electrode layer and comprising ZrO2; a second dielectric film formed on the first dielectric film and comprising a dielectric material comprising a Ti-containing metal oxide; and an upper electrode layer formed on the second dielectric film.</p>
申请公布号
WO2010082605(A1)
申请公布日期
2010.07.22
申请号
WO2010JP50350
申请日期
2010.01.14
申请人
TOKYO ELECTRON LIMITED;ARIKADO, TSUNETOSHI;KAITSUKA, TAKANOBU;AKASAKA, YASUSHI;ALBERT, CHIN