| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro electro mechanic system (MEMS) accelerometer and a method for detecting acceleration. <P>SOLUTION: One example of the micro electro mechanic system accelerometer 40 includes a housing 44, a testing mass 42 which is suspended by at least one of torsion inflection bodies 46-52 in the housing, at least one planar coil 60 on the testing mass which is extended on both sides of the axis of rotation of the testing mass, at least one of magnets 260 and 262 which is so directed that the north-south axis of the at least one magnet has a direction intersecting the axis of rotation of the testing mass at right angles substantially, at least one of pole shoes 280 and 282 which is provided outside the coil, and at least one of magnetic flux converging units 284 and 286 which is opposed to at least one of the pole shoes and provided inside the coil. The method includes a step of detecting a change in the capacitance of a pick-off in the MEMS accelerometer and a step of re-balancing the MEMS accelerometer by sending a current through the planar coil between the magnetic flux converging unit and the pole shoe. <P>COPYRIGHT: (C)2010,JPO&INPIT |
