| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measurement machine capable of properly correcting a movement amount of a probe when a measurement condition is changed. SOLUTION: The three-dimensional measurement machine includes: a probe including measurement piece movable within a predetermined range; a movement mechanism for moving the probe; and a controller for controlling the movement mechanism. The controller includes a measurement value calculating unit 53 for calculating a position of the measurement piece based on a movement amount of the movement mechanism and a movement amount of the probe. The measurement value calculating unit 53 includes: a correction parameter calculator 531 for calculating a correction parameter for correcting the movement amount of the probe based on the measurement condition in measuring a measurement object; a corrector 532 for correcting the movement amount of the probe based on the correction parameter; and a movement amount synthesizing unit 533 that synthesizes the movement amount of the movement mechanism and the movement amount of the probe corrected by the corrector 532 to calculate the position of the measurement piece. COPYRIGHT: (C)2010,JPO&INPIT
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