| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost ultrasonic flaw detector having a simple structure properly inspecting flaws on a cylindrical sputtering target. Ž<P>SOLUTION: An ultrasonic flaw detector 1 has: a probe 12 for transmitting and receiving ultrasonic waves to the surface of a sputtering target A; a probe moving mechanism 13 for linearly moving the probe 12 along an X- and Y-directions on a horizontal plane with respect to the sputtering target A; and a power transmitting mechanism 14 for rotationally moving the sputtering target A by converting the linear movement in the Y-direction of the probe moving mechanism 13 into rotational movement in the circumferential direction of the sputtering target A. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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