发明名称 |
Forming a Layer on a Substrate |
摘要 |
The present invention is directed to a method of forming an imprinting layer on a substrate including high resolution features, and transferring the features into a solidified region of the substrate. Desired thickness of the residual layer may be minimized in addition to visco-elastic behavior of the material.
|
申请公布号 |
US2010181289(A1) |
申请公布日期 |
2010.07.22 |
申请号 |
US20100749552 |
申请日期 |
2010.03.30 |
申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
SREENIVASAN SIDLGATA V.;WATTS MICHAEL P.C. |
分类号 |
C23F1/00;B28B1/14;B29C59/02;G03F7/00 |
主分类号 |
C23F1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|