发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a large-sized semiconductor device which works at high speed. <P>SOLUTION: A top-gate-type transistor including a single-crystal semiconductor layer and a bottom-gate-type transistor including a semiconductor layer of amorphous silicon (or micro-crystal silicon) are formed on the same substrate. Gate electrodes of the respective transistors are formed on the same layer, and source and drain electrodes are also formed on the same layer. Thus, a manufacturing process is reduced. That is, only by adding a small quantity of steps to the manufacturing process of the bottom-gate-type transistor, two types of transistors can be manufactured. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010161382(A) 申请公布日期 2010.07.22
申请号 JP20100023770 申请日期 2010.02.05
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 KIMURA HAJIME
分类号 H01L29/786;G02F1/1368;H01L21/02;H01L21/336;H01L21/8234;H01L27/08;H01L27/088;H01L27/12 主分类号 H01L29/786
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