METHODS OF THERMOREFLECTANCE THERMOGRAPHY

摘要

An embodiment of a method of performing thermoreflectance measurements with an imaging system comprises: reflecting radiation from a number of points in a sample in response to an illuminating radiation while a temperature modulation is applied to the sample; acquiring digital images of the reflected radiation after the reflected radiation passes through an aperture; and deriving a map of relative reflectivity of the sample based on the digital images. At least a portion of the illuminating radiation can pass through at least a portion of the sample and is reflected at a change refractive index interface.