发明名称 |
SCISSOR LIFT TRANSFER ROBOT |
摘要 |
A method and apparatus for a transfer robot that may be used in a vacuum environment is described. The transfer robot includes a lift assembly comprising a first platform and a second platform coupled to the first platform by a plurality of support members, the plurality of support members comprising a first pair of support members and a second pair of support members, a first drive assembly coupled to a portion of the plurality of support members, the first drive assembly providing a motive force to the plurality of support members to move the second platform in a first linear direction relative to the first platform, and an end effector disposed on the second platform and movable in a second linear direction by a second drive assembly, the second linear direction being orthogonal to the first linear direction. |
申请公布号 |
WO2010042448(A3) |
申请公布日期 |
2010.07.22 |
申请号 |
WO2009US59570 |
申请日期 |
2009.10.05 |
申请人 |
APPLIED MATERIALS, INC.;KURITA, SHINICHI;MATSUMOTO, TAKAYUKI;ANWAR, SUHAIL |
发明人 |
KURITA, SHINICHI;MATSUMOTO, TAKAYUKI;ANWAR, SUHAIL |
分类号 |
H01L21/677;B25J9/06;B65G49/06;B66F3/24;G02F1/13 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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