SPATIAL LIGHT MODULATION UNIT, ILLUMINATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

A spatial light modulation unit (SM1) can be arranged in an optical system and can be arranged along an optical axis of the optical system. The spatial light modulation unit (SM1) includes a first folding surface (R11) which folds light incident in parallel with the optical axis (Ax) of the optical system; a reflective spatial light modulator (S1) which folds the light folded on the first folding surface (R11); and a second folding surface (R12) which folds the light folded on the spatial light modulator (S1), to emit the light into the optical system. The spatial light modulator (S1) applies spatial modulation to the light, according to a position where the light folded on the first folding surface (R11) is incident to the spatial light modulator (S1).