| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate inspection apparatus equipped with a lighting system for a substrate inspection camera which accurately reads a real position coordinate of a fiducial mark. Ž<P>SOLUTION: The substrate inspection apparatus is configured of at least a first inspection unit 12, a second inspection unit 22, and a third inspection unit 32. Each of the inspection units 12, 22, 32 includes movable bodies 13, 23, 33 moving to the X-Y axis direction and contact probes 15, 25, 35 moving forward and backward to the direction of the surface of a substrate P to be inspected. The substrate inspection camera 18 equipped with the lighting system 19 with a light source 19b is disposed on the contact probe 15 side of the first inspection unit 12, and around the axes of each of the contact probes 25, 35 of the second inspection unit 22 and the third inspection unit 22, the lighting systems 28, 38 having light sources 28b, 38b having light axes of the advancing direction obliquely downward of each of the contact probes 25, 35, are disposed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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