| 发明名称 |
APPARATUS AND METHOD FOR SEGMENTING EDGES FOR OPTICAL PROXIMITY CORRECTION |
| 摘要 |
An apparatus and method for modifying a mask data set includes calculating a derivative of a figure-of-merit, indicative of a data set defined by a plurality of polygon edges and then segmenting polygon edges in response to said step of calculating.
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| 申请公布号 |
US2010186000(A1) |
申请公布日期 |
2010.07.22 |
| 申请号 |
US20100690791 |
申请日期 |
2010.01.20 |
| 申请人 |
SEZGINER ABDURRAHMAN;YENIKAYA BAYRAM;HUANG HSU-TING |
发明人 |
SEZGINER ABDURRAHMAN;YENIKAYA BAYRAM;HUANG HSU-TING |
| 分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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