| 摘要 |
PURPOSE: The MEMS mirror scanner and adjusting resonance frequency method can control the resonant frequency by varying the length and the width of the controlling element. CONSTITUTION: In the mirror section(110), the mirror facet prepares. It is respectively separated in both sides of the first and the second fixed end is the mirror section and it is formed. The first and second supporting spring parts(151, 152) elastically support the mirror section. The first and the second supporting spring part comprise the respective torsion bar(153) interlinked the mirror section and the first and the second fixed end. |
