PLATE APPARATUS OF PLACING A SUBSTRATE

摘要

PURPOSE: A substrate supporting device is provided to uniformly form a thin film on a substrate by differently making plasma density according to a process speed. CONSTITUTION: A holding unit(11) comprises one side to hold a substrate(10) for an electronic component. A high frequency electrode(13) is installed inside the holding unit. The high frequency is provided around the holding unit to generate plasma. A dielectric(15) is positioned to have different thickness on at least one of one side of the holding unit and the high frequency electrode. The dielectric becomes thin from the outer part to the central part of the holing unit.