Method for operating a piezo linear drive with a group of piezo stack actuators

摘要

The method involves providing two identical hybrid actuators (2) together so as to perform a reciprocal clamping motion and a feed motion. The actuators are electrically controlled for reciprocal or inversely phased reciprocal clamping and feed motions. Two stack parts (3, 4) of the actuators are connected in parallel for fine positioning of a piezo linear drive and are controlled, so that a target position of a rotor is adjustable to a momentary middle position at a region. A gap aligned to shearing motion is provided between the actuators provided on a common substrate (1).